Fall Research Expo 2024

Fabrication of Solid-State Silicon Nitride Membranes for Nanopore Devices

Solid-state nanopore technology applications span various fields, including DNA sequencing, filtration in desalination plants, and protein sequencing. As a result, I sought to standardize silicon nitride windows' fabrication. Using micro- and nanoscale fabrication techniques such as optical lithography, reactive ion etching (RIE), wet chemical etching, focused ion beam (FIB), and transmission electron microscopy (TEM), we achieve an atomically thin nanopore with diameters of only a few nanometers. This poster highlights the key steps taken during the substrate fabrication process for these nanoporous devices. 

PURM - Penn Undergraduate Research Mentoring Program
Engineering & Applied Sciences 2027
Advised By
Marija Drndić
Professor in Physics and Astronomy
PURM - Penn Undergraduate Research Mentoring Program
Engineering & Applied Sciences 2027
Advised By
Marija Drndić
Professor in Physics and Astronomy

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